Publication:
Modifications in the Si valence band after ion-beam-induced oxidation
Date
| dc.contributor.author | Alay, Josep Lluis | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-29T12:39:40Z | |
| dc.date.available | 2021-09-29T12:39:40Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12 | |
| dc.source.beginpage | 2420 | |
| dc.source.endpage | 2424 | |
| dc.source.issue | 4 | |
| dc.source.journal | Journal of Vacuum Science and Technology A | |
| dc.source.volume | 12 | |
| dc.title | Modifications in the Si valence band after ion-beam-induced oxidation | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |