Publication:
The impact of plasma-charging damage on the RF performance of deep-submicron MOSFET
Date
| dc.contributor.author | Pantisano, Luigi | |
| dc.contributor.author | Cheung, K. P. | |
| dc.contributor.author | Roussel, Philippe | |
| dc.contributor.author | Paccagnella, A. | |
| dc.contributor.imecauthor | Roussel, Philippe | |
| dc.contributor.orcidimec | Roussel, Philippe::0000-0002-0402-8225 | |
| dc.date.accessioned | 2021-10-14T22:41:52Z | |
| dc.date.available | 2021-10-14T22:41:52Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6692 | |
| dc.source.beginpage | 309 | |
| dc.source.endpage | 311 | |
| dc.source.issue | 6 | |
| dc.source.journal | IEEE Electron Device Letters | |
| dc.source.volume | 23 | |
| dc.title | The impact of plasma-charging damage on the RF performance of deep-submicron MOSFET | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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