Junction strategies for 1x nm technology node with FINFET and high mobility channel

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Author(s)

Horiguchi, Naoto

;

Zschaetzsch, Gerd

;

Sasaki, Yuichiro

;

Kambham, Ajay Kumar

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Douhard, Bastien

;

Togo, Mitsuhiro

;

Hellings, Geert

;

;

Witters, Liesbeth

;

;

;

Collaert, Nadine

;

Vandervorst, Wilfried

;

Metrics

1963 since deposited on 2021-10-20

Acq. date: 2025-10-23