Publication:

Junction strategies for 1x nm technology node with FINFET and high mobility channel

Date

2012
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorZschaetzsch, Gerd
dc.contributor.authorSasaki, Yuichiro
dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorDouhard, Bastien
dc.contributor.authorTogo, Mitsuhiro
dc.contributor.authorHellings, Geert
dc.contributor.authorMitard, Jerome
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorEneman, Geert
dc.contributor.authorNoda, Taiji
dc.contributor.authorCollaert, Nadine
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorThean, Aaron
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.accessioned2021-10-20T11:40:18Z
dc.date.available2021-10-20T11:40:18Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20822
dc.source.beginpage216
dc.source.conference12th International Workshop on Junction Technology - IWJT
dc.source.conferencedate14/05/2012
dc.source.conferencelocationShanghai China
dc.source.endpage221
dc.title

Junction strategies for 1x nm technology node with FINFET and high mobility channel

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions