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Buried Interconnects for Sub-5 nm SRAM Design
Publication:
Buried Interconnects for Sub-5 nm SRAM Design
Date
2022
Journal article
https://doi.org/10.1109/TED.2022.3143078
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mathur, R.
;
Bhargava, M.
;
Cline, B.
;
Salahuddin, Shairfe Muhammad
;
Gupta, Anshul
;
Schuddinck, Pieter
;
Ryckaert, Julien
;
Kulkarni, J.P.
Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
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1223
since deposited on 2023-06-20
Acq. date: 2025-10-25
Citations
Metrics
Views
1223
since deposited on 2023-06-20
Acq. date: 2025-10-25
Citations