Publication:

Buried Interconnects for Sub-5 nm SRAM Design

Date

2022

Journal article

https://doi.org/10.1109/TED.2022.3143078

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Author(s)

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Salahuddin, Shairfe Muhammad

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Schuddinck, Pieter

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Ryckaert, Julien

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Journal

IEEE TRANSACTIONS ON ELECTRON DEVICES

Metrics

1226 since deposited on 2023-06-20

3last month

1last week

Acq. date: 2025-12-14