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Accurate determination of Si sputter yield in the transient region
Publication:
Accurate determination of Si sputter yield in the transient region
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Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Deleu, Jeroen
;
Brijs, Bert
;
Vandervorst, Wilfried
Journal
Abstract
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1994
since deposited on 2021-10-06
2
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1994
since deposited on 2021-10-06
2
last month
Acq. date: 2025-12-11
Citations