Publication:
Accurate determination of Si sputter yield in the transient region
Date
| dc.contributor.author | Deleu, Jeroen | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-06T11:01:42Z | |
| dc.date.available | 2021-10-06T11:01:42Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3401 | |
| dc.source.conference | SIMS XII; 5-10 September 1999; Brussel, Belgium. | |
| dc.title | Accurate determination of Si sputter yield in the transient region | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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