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ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors
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ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sangameswaran, Sandeep
;
De Coster, Jeroen
;
Linten, Dimitri
;
Scholz, Mirko
;
Thijs, Steven
;
Haspeslagh, Luc
;
Witvrouw, Ann
;
Van Hoof, Chris
;
Groeseneken, Guido
;
De Wolf, Ingrid
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1870
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations
Metrics
Views
1870
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations