Publication:

ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors

Date

2008
Proceedings Paper
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dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorLinten, Dimitri
dc.contributor.authorScholz, Mirko
dc.contributor.authorThijs, Steven
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorThijs, Steven
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecThijs, Steven::0000-0003-2889-8345
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-17T10:26:08Z
dc.date.available2021-10-17T10:26:08Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14418
dc.source.beginpage249
dc.source.conference30th EOS/ESD Symposium
dc.source.conferencedate7/09/2008
dc.source.conferencelocationTucson, AZ USA
dc.source.endpage257
dc.title

ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors

dc.typeProceedings paper
dspace.entity.typePublication
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