Publication:

Low temperature spike anneal for Ni-Silicide formation

Date

2004
Journal article
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9277.pdf 1.13 MB

Author(s)

Lauwers, Anne  
;
Kittl, Jorge
;
Van Dal, Mark  
;
Chamirian, Oxana
;
Lindsay, Richard
;
de Potter de ten Broeck, Muriel  
;
Demeurisse, Caroline  
;
Vrancken, Christa  
;
Maex, Karen  

Journal

Microelectronic Engineering

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1994 since deposited on 2021-10-15
Acq. date: 2026-07-17

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1994 since deposited on 2021-10-15
Acq. date: 2026-07-17

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