Publication:

Physical and electrical characterization of silsesquioxane-based ultra-low k dielectric films

Date

2000

Proceedings Paper

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Files

4331.pdf 360.11 KB

Author(s)

Alves Donaton, Ricardo

;

Iacopi, Francesca

;

Baklanov, Mikhaïl

;

Shamiryan, Denis

;

Coenegrachts, Bart

;

Struyf, Herbert

;

;

;

Van Hove, Marleen

;

;

;

De Roest, David

;

Vanhaelemeersch, Serge

;

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