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Depth profiling intrinsically hybrid layers and organic/inorganic stacks by variable-size argon clusters: a ToF-SIMS and XPS study

Date

2018
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dc.contributor.authorBusby, Yan
dc.contributor.authorNoel, Celine
dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorFelten, Alexandre
dc.contributor.authorHoussiau, Laurent
dc.contributor.imecauthorNoel, Celine
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.orcidimecNoel, Celine::0000-0002-3000-8914
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.date.accessioned2021-10-25T17:00:09Z
dc.date.available2021-10-25T17:00:09Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30346
dc.source.conferenceSIMS Europe 2018
dc.source.conferencedate16/09/2018
dc.source.conferencelocationMünster Germany
dc.title

Depth profiling intrinsically hybrid layers and organic/inorganic stacks by variable-size argon clusters: a ToF-SIMS and XPS study

dc.typeMeeting abstract
dspace.entity.typePublication
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