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Scalability of strained nitride capping layers for future CMOS generations
Publication:
Scalability of strained nitride capping layers for future CMOS generations
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Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eneman, Geert
;
Jurczak, Gosia
;
Verheyen, Peter
;
Hoffmann, Thomas Y.
;
De Keersgieter, An
;
De Meyer, Kristin
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1839
since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations
Metrics
Views
1839
since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations