Publication:
Scalability of strained nitride capping layers for future CMOS generations
Date
| dc.contributor.author | Eneman, Geert | |
| dc.contributor.author | Jurczak, Gosia | |
| dc.contributor.author | Verheyen, Peter | |
| dc.contributor.author | Hoffmann, Thomas Y. | |
| dc.contributor.author | De Keersgieter, An | |
| dc.contributor.author | De Meyer, Kristin | |
| dc.contributor.imecauthor | Eneman, Geert | |
| dc.contributor.imecauthor | Jurczak, Gosia | |
| dc.contributor.imecauthor | Verheyen, Peter | |
| dc.contributor.imecauthor | De Keersgieter, An | |
| dc.contributor.imecauthor | De Meyer, Kristin | |
| dc.contributor.orcidimec | Eneman, Geert::0000-0002-5849-3384 | |
| dc.contributor.orcidimec | De Keersgieter, An::0000-0002-5527-8582 | |
| dc.date.accessioned | 2021-10-16T01:29:23Z | |
| dc.date.available | 2021-10-16T01:29:23Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10426 | |
| dc.source.beginpage | 449 | |
| dc.source.conference | Proceedings of the 35th European Solid-State Device Research Conference - ESSDERC | |
| dc.source.conferencedate | 12/09/2005 | |
| dc.source.conferencelocation | Grenoble France | |
| dc.source.endpage | 452 | |
| dc.title | Scalability of strained nitride capping layers for future CMOS generations | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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