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Articles
Industrial application of atom probe tomography to semiconductor devices
Publication:
Industrial application of atom probe tomography to semiconductor devices
Date
2018
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Giddings, Alexander Devin
;
Koelling, Sebastian
;
Shimizu, Shimizu
;
Estivill, Robert
;
Inoue, Koji
;
Vandervorst, Wilfried
;
Yeoh, Wai Kong
Journal
Scripta Materialia
Abstract
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1800
since deposited on 2021-10-25
2
last month
Acq. date: 2025-12-09
Citations
Metrics
Views
1800
since deposited on 2021-10-25
2
last month
Acq. date: 2025-12-09
Citations