Publication:

Industrial application of atom probe tomography to semiconductor devices

Date

2018
Journal article
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dc.contributor.authorGiddings, Alexander Devin
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorShimizu, Shimizu
dc.contributor.authorEstivill, Robert
dc.contributor.authorInoue, Koji
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorYeoh, Wai Kong
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-25T19:02:32Z
dc.date.available2021-10-25T19:02:32Z
dc.date.issued2018
dc.identifier.issn1359-6462
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30770
dc.identifier.urlhttps://www.sciencedirect.com/science/article/pii/S1359646217305146
dc.source.beginpage82
dc.source.endpage90
dc.source.journalScripta Materialia
dc.source.volume148
dc.title

Industrial application of atom probe tomography to semiconductor devices

dc.typeJournal article
dspace.entity.typePublication
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