Publication:

UV cure of oxycarbosilane low-k films

Date

2016

Journal article

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Author(s)

;

;

Krishtab, Mikhail

;

;

Vanstreels, Kris

;

Franquet, Alexis

;

Van der Voort, Pascal

;

Baklanov, Mikhaïl

Journal

Microelectronic Engineering

Metrics

1957 since deposited on 2021-10-23

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Acq. date: 2026-01-05