Publication:

UV cure of oxycarbosilane low-k films

Date

2016
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorRedzheb, Murad
dc.contributor.authorPrager, Lutz
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorArmini, Silvia
dc.contributor.authorVanstreels, Kris
dc.contributor.authorFranquet, Alexis
dc.contributor.authorVan der Voort, Pascal
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.date.accessioned2021-10-23T14:07:18Z
dc.date.available2021-10-23T14:07:18Z
dc.date.issued2016
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27202
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931716300442
dc.source.beginpage103
dc.source.endpage107
dc.source.journalMicroelectronic Engineering
dc.source.volume156
dc.title

UV cure of oxycarbosilane low-k films

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles