Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks

Publication:

2021

Proceedings Paper

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Proceedings of IEEE 51st European Solid-State Device Research Conference (ESSDERC)

1676 since deposited on 2022-05-15

Acq. date: 2026-01-26