Publication:

Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks

Date

2021
Proceedings Paper
https://doi.org/10.1109/ESSDERC53440.2021.9631815
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dc.contributor.authorRawat, Amita
dc.contributor.authorBhuwalka, Krishna K.
dc.contributor.authorMatagne, Philippe
dc.contributor.authorVermeersch, Bjorn
dc.contributor.authorWu, Hao
dc.contributor.authorHellings, Geert
dc.contributor.authorRyckaert, Julien
dc.contributor.authorLiu, Changze
dc.contributor.imecauthorRawat, Amita
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorVermeersch, Bjorn
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.orcidimecVermeersch, Bjorn::0000-0001-8640-672X
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.date.accessioned2022-08-26T08:42:23Z
dc.date.available2022-05-15T02:18:26Z
dc.date.available2022-08-16T09:36:11Z
dc.date.available2022-08-26T08:42:23Z
dc.date.issued2021
dc.identifier.doi10.1109/ESSDERC53440.2021.9631815
dc.identifier.eisbn978-1-6654-3748-6
dc.identifier.issn1930-8876
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39820
dc.publisherIEEE
dc.source.beginpage55
dc.source.conferenceIEEE 51st European Solid-State Device Research Conference (ESSDERC)
dc.source.conferencedateSEP 06-09, 2021
dc.source.conferencelocationGrenoble, France
dc.source.endpage58
dc.source.journalProceedings of IEEE 51st European Solid-State Device Research Conference (ESSDERC)
dc.source.numberofpages4
dc.title

Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks

dc.typeProceedings paper
dspace.entity.typePublication
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