Publication:

Low-temperature formation of source-drain contacts in self-aligned amorphous oxide TFTs

Date

2014

Proceedings Paper

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Author(s)

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Steudel, Soeren

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Bhoolokam, Ajay

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Vaisman Chasin, Adrian

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Kumar, Abhishek

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Gelinck, Gerwin

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Groeseneken, Guido

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Acq. date: 2026-08-06