Publication:

Low-temperature formation of source-drain contacts in self-aligned amorphous oxide TFTs

Date

2014
Proceedings Paper
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dc.contributor.authorNag, Manoj
dc.contributor.authorMuller, Robert
dc.contributor.authorSteudel, Soeren
dc.contributor.authorSmout, Steve
dc.contributor.authorBhoolokam, Ajay
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorMyny, Kris
dc.contributor.authorCobb, Brian
dc.contributor.authorSchols, Sarah
dc.contributor.authorGenoe, Jan
dc.contributor.authorKumar, Abhishek
dc.contributor.authorGelinck, Gerwin
dc.contributor.authorFukui, Yusuke
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHeremans, Paul
dc.contributor.imecauthorNag, Manoj
dc.contributor.imecauthorSmout, Steve
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorMyny, Kris
dc.contributor.imecauthorSchols, Sarah
dc.contributor.imecauthorGenoe, Jan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHeremans, Paul
dc.contributor.orcidimecSmout, Steve::0000-0001-5464-8951
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecMyny, Kris::0000-0002-5230-495X
dc.contributor.orcidimecGenoe, Jan::0000-0002-4019-5979
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.date.accessioned2021-10-22T04:08:07Z
dc.date.available2021-10-22T04:08:07Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24300
dc.source.beginpagena
dc.source.conferenceInternational Meeting on Information Display - IMID
dc.source.conferencedate24/08/2014
dc.source.conferencelocationDaegu South Korea
dc.title

Low-temperature formation of source-drain contacts in self-aligned amorphous oxide TFTs

dc.typeProceedings paper
dspace.entity.typePublication
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