Publication:

Cumulated charging mechanisms at gate processing in high-kappa first planar NMOS devices

Date

2020

Proceedings Paper

https://doi.org/10.1109/iirw49815.2020.9312853

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Author(s)

Hiblot, Gaspard

;

Parihar, Narendra

;

Dupuy, Emmanuel

;

Mannaert, Geert

;

Baudot, Sylvain

;

;

De Heyn, Vincent

;

Mercha, Abdelkarim

Journal

na

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1833 since deposited on 2021-11-02

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Acq. date: 2026-08-09