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Barrier reliability for Cu contacts
Publication:
Barrier reliability for Cu contacts
Date
2007
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Chao
;
Demuynck, Steven
;
Van den Bosch, Geert
;
Tokei, Zsolt
;
Beyer, Gerald
Journal
Abstract
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2020
since deposited on 2021-10-16
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last month
Acq. date: 2025-12-08
Citations
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Views
2020
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-08
Citations