Publication:
Barrier reliability for Cu contacts
Date
| dc.contributor.author | Zhao, Chao | |
| dc.contributor.author | Demuynck, Steven | |
| dc.contributor.author | Van den Bosch, Geert | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.imecauthor | Demuynck, Steven | |
| dc.contributor.imecauthor | Van den Bosch, Geert | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
| dc.date.accessioned | 2021-10-16T22:01:16Z | |
| dc.date.available | 2021-10-16T22:01:16Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13267 | |
| dc.source.conference | Advanced Semiconductor Technology Symposium | |
| dc.source.conferencedate | 18/10/2007 | |
| dc.source.conferencelocation | Beijing China | |
| dc.title | Barrier reliability for Cu contacts | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |