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APT analysis of short (~200 nm) Si nanowires embedded in SiO2 and HfO2
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APT analysis of short (~200 nm) Si nanowires embedded in SiO2 and HfO2
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Date
2016
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Melkonyan, Davit
;
Fleischmann, Claudia
;
Veloso, Anabela
;
Arnoldi, Laurent
;
Kumar, Arul
;
Bogdanowicz, Janusz
;
Vurpillot, Francois
;
Vandervorst, Wilfried
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1989
since deposited on 2021-10-23
Acq. date: 2025-12-10
Citations
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Views
1989
since deposited on 2021-10-23
Acq. date: 2025-12-10
Citations