Publication:
Enhancing etch contrast in DSA block copolymer films with sequential infiltration synthesis on 300mm Si substrates
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2002 since deposited on 2021-10-22
1last week
Acq. date: 2026-07-30
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Statistics
Views
2002 since deposited on 2021-10-22
1last week
Acq. date: 2026-07-30
Citations