Publication:
Enhancing etch contrast in DSA block copolymer films with sequential infiltration synthesis on 300mm Si substrates
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1999 since deposited on 2021-10-22
5last month
Acq. date: 2026-04-28
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Statistics
Views
1999 since deposited on 2021-10-22
5last month
Acq. date: 2026-04-28
Citations