Publication:

Superior electrostatic control in uniform monolayer MoS2 scaled transistors via in-situ surface smoothening

Date

2021
Proceedings Paper
https://doi.org/10.1109/IEDM19574.2021.9720676
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Author(s)

Shi, Yuanyuan  
;
Groven, Benjamin  
;
Smets, Quentin  
;
Sutar, Surajit  
;
Banerjee, Sreetama  
;
Medina, Henry
;
Wu, Xiangyu  
;
Huyghebaert, Cedric  
;
Brems, Steven  
;
Lin, Dennis  
;
Morin, Pierre  
;
Caymax, Matty  
;
Asselberghs, Inge  
;
Radu, Iuliana  

Journal

na

Abstract

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1591 since deposited on 2022-07-09
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Acq. date: 2026-02-24

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