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The effect of ion implantation on the metal contamination of silicon surfaces in aqueous solution
Publication:
The effect of ion implantation on the metal contamination of silicon surfaces in aqueous solution
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Date
2001
Proceedings Paper
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5465.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loewenstein, Lee
;
Mertens, Paul
;
Heyns, Marc
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1806
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Acq. date: 2025-12-16
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Views
1806
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-16
Citations