Publication:

The effect of ion implantation on the metal contamination of silicon surfaces in aqueous solution

Date

2001
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorLoewenstein, Lee
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.date.accessioned2021-10-14T17:16:37Z
dc.date.available2021-10-14T17:16:37Z
dc.date.embargo9999-12-31
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5451
dc.source.beginpage7
dc.source.conferenceUltra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS
dc.source.conferencedate18/09/2000
dc.source.conferencelocationOostende Belgium
dc.source.endpage8
dc.title

The effect of ion implantation on the metal contamination of silicon surfaces in aqueous solution

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
5465.pdf
Size:
152 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions