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Cost-performance optimization of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurations
Publication:
Cost-performance optimization of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurations
Date
2021
Proceedings Paper
https://doi.org/10.1117/12.2552036
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Milojevic, Dragomir
;
Beyne, Eric
;
Van der Plas, Geert
;
Wang, Jane
;
Debacker, Peter
Journal
Proceedings of SPIE
Abstract
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1376
since deposited on 2021-11-02
Acq. date: 2025-10-25
Citations
Metrics
Views
1376
since deposited on 2021-11-02
Acq. date: 2025-10-25
Citations