Publication:

Cost-performance optimization of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurations

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2552036
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dc.contributor.authorMilojevic, Dragomir
dc.contributor.authorBeyne, Eric
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorWang, Jane
dc.contributor.authorDebacker, Peter
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorWang, Jane
dc.contributor.imecauthorDebacker, Peter
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecDebacker, Peter::0000-0003-3825-5554
dc.date.accessioned2023-01-19T09:49:52Z
dc.date.available2021-11-02T15:58:54Z
dc.date.available2023-01-19T09:49:52Z
dc.date.issued2021
dc.identifier.doi10.1117/12.2552036
dc.identifier.eisbn978-1-5106-3424-4
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37728
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage113280R
dc.source.conferenceConference on Design-Process-Technology Co-Optimization for Manufacturability XIV
dc.source.conferencedateFEB 26-27, 2020
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages6
dc.source.volume11328
dc.title

Cost-performance optimization of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurations

dc.typeProceedings paper
dspace.entity.typePublication
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