Publication:

Properties and performance of EUVL pellicle membranes

Date

2015

Proceedings Paper

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Files

33792.pdf 1.72 MB

Author(s)

Gallagher, Emily

;

Vanpaemel, Johannes

;

Pollentier, Ivan

;

Zahedmanesh, Houman

;

Adelmann, Christoph

;

Huyghebaert, Cedric

;

Jonckheere, Rik

;

Statistics

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Acq. date: 2026-01-26