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Comparison between wet and dry silicon via reveal in 3D backside processing
Publication:
Comparison between wet and dry silicon via reveal in 3D backside processing
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Date
2015
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Thomas, Dave
;
Hopkins, Janet
;
Ashraf, Huma
;
Patel, Jash
;
Ansell, Oliver
;
Jourdain, Anne
;
De Vos, Joeri
;
Miller, Andy
;
Beyne, Eric
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1942
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Acq. date: 2025-12-12
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Metrics
Views
1942
since deposited on 2021-10-22
2
last month
1
last week
Acq. date: 2025-12-12
Citations