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A Comprehensive Microstructure-Aware Electromigration Modeling Framework; Investigation of the Impact of Trench Dimensions in Damascene Copper Interconnects

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Acq. date: 2026-09-10

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338 since deposited on 2024-12-06
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161 since deposited on 2024-12-06
Acq. date: 2026-09-10

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