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Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions
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Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions
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Date
2008
Proceedings Paper
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16776.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rosseel, Erik
;
Vandervorst, Wilfried
;
Clarysse, Trudo
;
Goossens, Jozefien
;
Moussa, Alain
;
Lin, Rong
;
Petersen, Dirch
;
Nielsen, Peter
;
Hansen, Otto
;
Bennett, Nick
;
Cowern, Nick
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1897
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Acq. date: 2025-12-10
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Views
1897
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-10
Citations