Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Presentations
Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips
Publication:
Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips
Date
1994
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Clarysse, Trudo
;
De Wolf, Peter
;
Hellemans, L.
;
Snauwaerts, Jan
Journal
Abstract
Description
Metrics
Views
2035
since deposited on 2021-09-29
460
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
2035
since deposited on 2021-09-29
460
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations