Publication:
Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | De Wolf, Peter | |
| dc.contributor.author | Hellemans, L. | |
| dc.contributor.author | Snauwaerts, Jan | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-29T12:50:55Z | |
| dc.date.available | 2021-09-29T12:50:55Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/418 | |
| dc.source.conference | American Vacuum Society Meeting; October 24-28, 1994; Denver, USA. | |
| dc.title | Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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