Unbiased roughness measurements from low signal-to-noise ratio scanning electron microscope images

dc.contributor.author	Mack, Chris A.
dc.contributor.author	Severi, Joren
dc.contributor.author	Zidan, Mohamed
dc.contributor.author	De Simone, Danilo
dc.contributor.author	Lorusso, Gian
dc.contributor.imecauthor	Severi, Joren
dc.contributor.imecauthor	Zidan, Mohamed
dc.contributor.imecauthor	De Simone, Danilo
dc.contributor.imecauthor	Lorusso, Gian
dc.contributor.orcidimec	De Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimec	Lorusso, Gian::0000-0003-3498-5082
dc.date.accessioned	2024-02-27T09:46:42Z
dc.date.available	2024-01-08T17:19:01Z
dc.date.available	2024-02-27T09:46:42Z
dc.date.issued	2023
dc.identifier.doi	10.1117/1.JMM.22.2.021006
dc.identifier.issn	1932-5150
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/43361
dc.publisher	SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
dc.source.beginpage	Art. 021006
dc.source.endpage	N/A
dc.source.issue	2
dc.source.journal	JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
dc.source.numberofpages	10
dc.source.volume	22
dc.title	Unbiased roughness measurements from low signal-to-noise ratio scanning electron microscope images
dc.type	Journal article
dspace.entity.type	Publication
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