Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Reliability of ultra-thin gate oxide below 3 nm in the direct tunneling regime
Publication:
Reliability of ultra-thin gate oxide below 3 nm in the direct tunneling regime
Copy permalink
Date
1997
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
1823.pdf
1.1 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Depas, Michel
;
Degraeve, Robin
;
Nigam, Tanya
;
Groeseneken, Guido
;
Heyns, Marc
Journal
Japanese Journal of Applied Physics. Part 1
Abstract
Description
Metrics
Downloads
2
since deposited on 2021-09-30
Acq. date: 2025-12-15
Views
1911
since deposited on 2021-09-30
Acq. date: 2025-12-15
Citations
Metrics
Downloads
2
since deposited on 2021-09-30
Acq. date: 2025-12-15
Views
1911
since deposited on 2021-09-30
Acq. date: 2025-12-15
Citations