Publication:
Nitrogen profiling in high-k layers has much to gain from a combined TOFSIMS-Angle resolved XPS combined study
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1900 since deposited on 2021-10-16
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Acq. date: 2026-08-10
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Views
1900 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-08-10
Citations