Publication:
Nitrogen profiling in high-k layers has much to gain from a combined TOFSIMS-Angle resolved XPS combined study
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1899 since deposited on 2021-10-16
1last month
Acq. date: 2026-05-18
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Statistics
Views
1899 since deposited on 2021-10-16
1last month
Acq. date: 2026-05-18
Citations