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Deposition of MnO anode And MnO2 cathode thin films by plasma enhanced atomic layer deposition using the Mn(thd)3 precursor
Publication:
Deposition of MnO anode And MnO2 cathode thin films by plasma enhanced atomic layer deposition using the Mn(thd)3 precursor
Date
2015
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mattelaer, Felix
;
Vereecken, Philippe
;
Dendooven, Jolien
;
Detavernier, Christophe
Journal
Chemistry of Materials
Abstract
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1920
since deposited on 2021-10-22
457
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Acq. date: 2025-10-24
Citations
Metrics
Views
1920
since deposited on 2021-10-22
457
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations