Publication:
Deposition of MnO anode And MnO2 cathode thin films by plasma enhanced atomic layer deposition using the Mn(thd)3 precursor
Date
| dc.contributor.author | Mattelaer, Felix | |
| dc.contributor.author | Vereecken, Philippe | |
| dc.contributor.author | Dendooven, Jolien | |
| dc.contributor.author | Detavernier, Christophe | |
| dc.contributor.imecauthor | Vereecken, Philippe | |
| dc.contributor.orcidimec | Vereecken, Philippe::0000-0003-4115-0075 | |
| dc.date.accessioned | 2021-10-22T20:59:44Z | |
| dc.date.available | 2021-10-22T20:59:44Z | |
| dc.date.issued | 2015 | |
| dc.identifier.issn | 0897-4756 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25629 | |
| dc.identifier.url | http://pubs.acs.org/doi/abs/10.1021/acs.chemmater.5b00255 | |
| dc.source.beginpage | 3628 | |
| dc.source.endpage | 3635 | |
| dc.source.issue | 10 | |
| dc.source.journal | Chemistry of Materials | |
| dc.source.volume | 27 | |
| dc.title | Deposition of MnO anode And MnO2 cathode thin films by plasma enhanced atomic layer deposition using the Mn(thd)3 precursor | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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