Publication:

Si1-xGex-channel PFETs: scalability, layout considerations and compatibility with other stress techniques

Date

2011
Proceedings Paper
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Author(s)

Eneman, Geert  
;
Hellings, Geert  
;
Mitard, Jerome  
;
Witters, Liesbeth  
;
Yamaguchi, Shinpei
;
Garcia Bardon, Marie  
;
Christie, Phillip  
;
Ortolland, Claude
;
Hikavyy, Andriy  
;
Favia, Paola  
;
Bargallo Gonzalez, Mireia
;
Simoen, Eddy  
;
Crupi, Felice
;
Kobayashi, Masaharu
;
Franco, Jacopo  
;
Takeoka, Shinji
;
Krom, Raymond
;
Bender, Hugo  
;
Loo, Roger  
;
Claeys, Cor
;
De Meyer, Kristin  
;
Hoffmann, Thomas Y.

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1889 since deposited on 2021-10-19
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