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Study and characterization of GaN MOS capacitors: Planar vs trench topographies

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dc.contributor.authorMukherjee, K.
dc.contributor.authorDe Santi, C.
dc.contributor.authorYou, Shuzhen
dc.contributor.authorGeens, Karen
dc.contributor.authorBorga, Matteo
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorBakeroot, Benoit
dc.contributor.authorDiehle, P.
dc.contributor.authorAltmann, F.
dc.contributor.authorMeneghesso, G.
dc.contributor.authorZanoni, E.
dc.contributor.authorMeneghini, M.
dc.contributor.imecauthorYou, Shuzhen
dc.contributor.imecauthorGeens, Karen
dc.contributor.imecauthorBorga, Matteo
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorBakeroot, Benoit
dc.contributor.orcidimecGeens, Karen::0000-0003-1815-3972
dc.contributor.orcidimecBorga, Matteo::0000-0003-3087-6612
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.contributor.orcidimecBakeroot, Benoit::0000-0003-4392-1777
dc.date.accessioned2022-12-01T16:16:03Z
dc.date.available2022-07-29T02:29:07Z
dc.date.available2022-12-01T16:16:03Z
dc.date.embargo2023-04-04
dc.date.issued2022
dc.description.wosFundingTextThis work was carried out within the UltimateGaN project, which has received funding from the ECSEL Joint Undertaking (JU) under Grant Agreement No. 826392. The JU receives support from the European Union's Horizon 2020 research and innovation programme and Austria, Belgium, Germany, Italy, Slovakia, Spain, Sweden, Norway, and Switzerland. The UltimateGaN project is co-funded by the Ministry of Education, Universities and Research in Italy. The authors would like to thank A. B_obenroth for TEM sample preparation.
dc.identifier.doi10.1063/5.0087245
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40182
dc.publisherAIP Publishing
dc.source.beginpage143501
dc.source.endpagena
dc.source.issue14
dc.source.journalAPPLIED PHYSICS LETTERS
dc.source.numberofpages5
dc.source.volume120
dc.title

Study and characterization of GaN MOS capacitors: Planar vs trench topographies

dc.typeJournal article
dspace.entity.typePublication
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