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Low-k dielectrics: spin-on or CVD?
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Low-k dielectrics: spin-on or CVD?
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Bavel, Mieke
;
Iacopi, Francesca
;
Baklanov, Mikhaïl
;
Maex, Karen
Journal
Future Fab
Abstract
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1881
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Acq. date: 2025-12-15
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Metrics
Views
1881
since deposited on 2021-10-15
3
last month
Acq. date: 2025-12-15
Citations