Publication:
Low-k dielectrics: spin-on or CVD?
Date
| dc.contributor.author | Van Bavel, Mieke | |
| dc.contributor.author | Iacopi, Francesca | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Van Bavel, Mieke | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T16:47:54Z | |
| dc.date.available | 2021-10-15T16:47:54Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9706 | |
| dc.source.beginpage | 95 | |
| dc.source.endpage | 98 | |
| dc.source.issue | 17 | |
| dc.source.journal | Future Fab | |
| dc.title | Low-k dielectrics: spin-on or CVD? | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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