Publication:
Impact of millisecond laser anneal on the thermal stress-induced defect creation in Si1-xGex source/drain junctions
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1915 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-15
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Metrics
Views
1915 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-15
Citations