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Impacts of process options on ESD device characteristics in sub-20nm bulk FinFET technology nodes
Publication:
Impacts of process options on ESD device characteristics in sub-20nm bulk FinFET technology nodes
Date
2014-12
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chen, Shih-Hung
;
Lee, Jam-Wem
;
Linten, Dimitri
;
Scholz, Mirko
;
Song, Ming-Hsiang
;
Hellings, Geert
;
Boschke, Roman
;
Sibaja-Hernandez, Arturo
;
Groeseneken, Guido
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Abstract
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1885
since deposited on 2021-10-22
Acq. date: 2025-10-24
Citations
Metrics
Views
1885
since deposited on 2021-10-22
Acq. date: 2025-10-24
Citations