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Sequential 3D standard cell 4T architecture using design crenellation and self-aligned MOL for N2 technology and beyond
Publication:
Sequential 3D standard cell 4T architecture using design crenellation and self-aligned MOL for N2 technology and beyond
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Date
2020
Proceedings Paper
https://doi.org/10.1117/12.2552032
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Weckx, Pieter
;
Chehab, Bilal
;
Ryckaert, Julien
;
Verkest, Diederik
;
Spessot, Alessio
Journal
Proceedings of SPIE
Abstract
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649
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1105
since deposited on 2023-08-09
Acq. date: 2025-12-15
Citations
Metrics
Downloads
649
since deposited on 2023-08-09
56
last month
11
last week
Acq. date: 2025-12-15
Views
1105
since deposited on 2023-08-09
Acq. date: 2025-12-15
Citations